Surface micromachined polyimide scanning thermocouple probes
نویسندگان
چکیده
منابع مشابه
Surface Micromachined Polyimide Scanning Thermocouple Probes
This paper describes micromachined scanning thermocouple probes that exploit the low thermal conductivity and the high mechanical flexibility of polyimide as a structural material. They are surface micromachined using a low-temperature six-mask process suitable for appending to a CMOS fabrication sequence. The probes are 200–1000m long, 40–120m wide, and of varying thickness. They are assembled...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2001
ISSN: 1057-7157
DOI: 10.1109/84.911085